JPS62187680U - - Google Patents

Info

Publication number
JPS62187680U
JPS62187680U JP7464386U JP7464386U JPS62187680U JP S62187680 U JPS62187680 U JP S62187680U JP 7464386 U JP7464386 U JP 7464386U JP 7464386 U JP7464386 U JP 7464386U JP S62187680 U JPS62187680 U JP S62187680U
Authority
JP
Japan
Prior art keywords
substrate
processing liquid
spray device
main surface
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7464386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446860Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986074643U priority Critical patent/JPH0446860Y2/ja
Publication of JPS62187680U publication Critical patent/JPS62187680U/ja
Application granted granted Critical
Publication of JPH0446860Y2 publication Critical patent/JPH0446860Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Coating Apparatus (AREA)
JP1986074643U 1986-05-20 1986-05-20 Expired JPH0446860Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986074643U JPH0446860Y2 (en]) 1986-05-20 1986-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986074643U JPH0446860Y2 (en]) 1986-05-20 1986-05-20

Publications (2)

Publication Number Publication Date
JPS62187680U true JPS62187680U (en]) 1987-11-28
JPH0446860Y2 JPH0446860Y2 (en]) 1992-11-05

Family

ID=30920044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986074643U Expired JPH0446860Y2 (en]) 1986-05-20 1986-05-20

Country Status (1)

Country Link
JP (1) JPH0446860Y2 (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0345631U (en]) * 1989-09-13 1991-04-26
JPH05208163A (ja) * 1991-10-29 1993-08-20 Internatl Business Mach Corp <Ibm> スピン・コーティング装置および方法
WO2003105201A1 (ja) * 2002-06-07 2003-12-18 東京エレクトロン株式会社 基板処理装置、基板処理方法及び現像装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5564234A (en) * 1978-11-06 1980-05-14 Mitsubishi Electric Corp Developing method of resist film
JPS5575223A (en) * 1978-12-04 1980-06-06 Fujitsu Ltd Manufacturing semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5564234A (en) * 1978-11-06 1980-05-14 Mitsubishi Electric Corp Developing method of resist film
JPS5575223A (en) * 1978-12-04 1980-06-06 Fujitsu Ltd Manufacturing semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0345631U (en]) * 1989-09-13 1991-04-26
JPH05208163A (ja) * 1991-10-29 1993-08-20 Internatl Business Mach Corp <Ibm> スピン・コーティング装置および方法
WO2003105201A1 (ja) * 2002-06-07 2003-12-18 東京エレクトロン株式会社 基板処理装置、基板処理方法及び現像装置

Also Published As

Publication number Publication date
JPH0446860Y2 (en]) 1992-11-05

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